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02 May 2002 - NOVATEC's Ball placement technology is 300 mm ready.

DEK has successfully deployed a production wafer bumping solution for 30Omm wafers at a customer site in Asia. The system has been developed using DEK's mass imaging technology for back end wafer processing. The wafer handling technology developed by Adept Semiconductor Equipment Division of Livermore, California in conjunction with DEK.

The new system builds on DEK's existing back end solutions for 15Omm and 20Omm wafers, and is capable of transferring 30Omm wafers from open cassettes or FOUP's into the processing station, and of automatically returning them to the cassette or FOU P when processing is complete. Wafers are transported by a conveyor, which is integrated with the system via standard, SMEMA-compliant interfaces. “This is a real, production system that is in action today, processing customer’s 30Omm wafers and delivering excellent results," said Neil MacRaild, manager of DEK's Advanced Technologies Group. "This is important news as commercial electronic manufacturers move toward volume production of high performance chip scale packages."

DEK's back end processing solutions for 15Omm and 20Omm wafers are already in operation at customer sites throughout Europe, the USA and Asia. These successful processes, including DirEKt Ball AttachTM solder ball placement, and fine-pitch bumping by paste deposition, are based on DEK's patented ProFlow ® DirEKt lmaging technology that enables precision control of electronic materials for deposition onto wafers and other substrates such as FR4 epoxy. These include solder balls down to 0.3mm, solder pastes including low-alpha pastes, encapsulants and other materials required by advanced semiconductor packaging.

By reducing the capital cost of clean room space of back end wafer level processes, while enhancing equipment flexibility and first pass yield, DEK's packaging technologies allow advanced wafer level CSPs and other chip scale package styles to be applied to a wide range of commercial component types.

 


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